This stage structure is a three-piece construction, which has been designed for minimum distortion and highest precision  stage geometry. Stiffness and stability have been maximized to achieve the highest support and integrity. The backlash-free pre-loaded guide system achieves smooth, low-friction, precision motion for highly accurate positioning and trouble free long-term performance.

The METROSTAGE Series has a very wide range of application, because of adaptable and configurations and execution, offering many different motion platforms with different characteristics. Many applications are found in the metrology and fabrication fields, where a precise, compact X/Y motion platform is desirable. Other typical applications are found in semiconductor assembly, testing, and fabrication areas, video inspection, micro-machining, laser machining, high-speed fabrication, laser and inspection work. Many customers utilize the stage with manual turn knobs, because of the insufficient precision performance of conventional microscope stages.

METROSTAGE Configurations

· Travels from 100mm x 100mm to 300 mm x 300mm

· Stage height as low as 60 mm

· Open Frame or Solid Top

· Clean Room Compatible

· Vacuum Compatible

· Non-Magnetic

METROSTAGE Guide Systems

· Cross Roller

· Quad-Vee Lock Needle

· Hybrid Guide Bearings

METROSTAGE Drive Systems

· Precision ground ball screw

· Linear Motor iron core/ironless

· Ceramic Servo Motor

METROSTAGE Position Feedback Systems

· Rotary Encoders

· Linear Encoders

· Laser Scale Encoders