A linear motor driven stage suitable for applications where reliable 24/7 operation, precision positioning and ease of use are desirable characteristics. The versatile 150 mm x 46mm envelope is well suited for many instrument type machines and robotic devices.
Lineax® direct drive linear motors for stage positioning exhibit advantages over conventional screw driven stages. Direct drive systems offer excellent trajectory control. The nature of these stiff, no elastic structures enable fast settling times, high repeatability with the fastest servo response. Free of rotating inertia, much faster acceleration and higher velocities are achievable. Wear of rotating components is eliminated increasing reliability, uptime, and extending servicing intervals each of these contributes to reducing cost of ownership. The direct drive linear motor with the high-resolution encoder allows precise velocity regulation.
Lineax-6 structural materials are high-strength aluminum alloys. All surfaces are precision machined, hard coat-anodize finished. Two precision re-circulating linear ball bearings are guided by 2 integrally pre-loaded ball tracks on each rail. The guide system has extended 5 year intervals only for lubrication service.
Lineax-6 stages have a compact envelope with no motor overhang. Motor and encoder cables are routed in an external cable loop for long life and serviceability. The connection port is at the stage end with axial bulkhead exit.
Lineax-6 is an outstanding precision linear motor positioning stage, well suited for applications in the semiconductor, instrumentation, fiber-optic, biomedical, laser and micro-machining industries. Special finishes like Teflon impregnated hard-coat, non-anodized, and electro less Nickel can be furnished to accommodate specific application environments. Stainless steel components are made from polished material.
A linear motor driven stage lacks the mechanical gearing advantage of a screw driven stage and therefore is more application specific. The payload directly affects the acceleration rate according to the F=m•a relationship and the ability of the stage to reach a specific speed, which may affect the cycle time or throughput.
The linear motor generates a substantial peak force when supplied the necessary current by the servo drive. The higher the current, the more heating experiences the copper coil, rising motor temperature. The Lineax-6 is built with an iron core coil assembly with excellent thermal management capability for robust application environments.
| LX-6050 | LX-6100 | LX-6200 | LX-6300 | LX-6450 | LX-6600 | |
|---|---|---|---|---|---|---|
| Travel Length | 50 mm | 100 mm | 200 mm | 300 mm | 450 mm | 600 mm |
| Accuracy | ||||||
| Standard SP | ± 5 µm | ± 10 µm | ± 20 µm | ± 25 µm | ± 30 µm | ± 35 µm |
| High Precision HP | ± 2 µm | ± 4 µm | ± 8 µm | ± 10 µm | ± 12 µm | ± 15 µm |
| Straightness/Flatness | ||||||
| Standard SP | ± 4 µm | ± 8 µm | ± 10 µm | ± 12 µm | ± 15 µm | ± 20 µm |
| High Precision HP | ± 2 µm | ± 4 µm | ± 5 µm | ± 5 µm | ± 5 µm | ± 5 µm |
| Yaw/Pitch | ||||||
| Standard SP | 10 arc-sec | 15 arc-sec | 20 arc-sec | 30 arc-sec | 40 arc-sec | 50 arc-sec |
| High Precision HP | 5 arc-sec | 7.5 arc-sec | 10 arc-sec | 15 arc-sec | 20 arc-sec | 25 arc-sec |
| LX-6 SP | |
|---|---|
| Travel Length | 50-600 mm |
| Drive System | Brushless Linear Servo Motor |
| Maximum Acceleration | Payload Dependent |
| Maximum Speed | Unladen 2 m/s |
| Maximum Peak Force | 202 N |
| Maximum Continuous Force | 96 N |
| Recommended payload limit | 15 kg |